The small-format high-speed microhole machining system is a precision micro-machining equipment based on a high-power, high-stability ultraviolet laser. It is particularly suitable for small-format high-speed microhole machining and can also meet large-format machining requirements through a micron-level high-speed linear motor platform. The system integrates advanced laser technology, precision motion control, and online monitoring technology to provide micron-level precision microhole machining solutions for a variety of materials.
Product Features
Utilizes high-power ultraviolet laser to directly ablate and vaporize materials, resulting in a μm-level heat-affected zone.
Achieves high-speed, high-precision etching through precise galvanometer control.
Electrically adjustable Z-axis to accommodate various thicknesses and 3D structures.
High-resolution industrial camera for high-precision focusing and repeatability.
Stable marble table top ensures long-term precision for all mechanical components.
Versatile processing for metals, ceramics, organics, glass, etc. (etching, through holes, slotting).
Minimum processing line width of 5 μm with a range of 50*50 mm.
Product Applications
Electronics Manufacturing: Semiconductor flexible circuit board cutting, ITO film layer etching, microelectronic device manufacturing.
Medical Industry: Drug filtration, biosensors, microfluidic chips, CC IT positive sample preparation (pore sizes 1-30 μm).
Scientific Research: Microstructure research, material science experiments, micro-nano manufacturing.
Product Parameters
Category
Parameter
Value (FM-UV3)
Laser
Wavelength
355 nm
Laser
Power
> 3W @ 40 kHz (3-40W optional)
Laser
Modulation Frequency
1-200 kHz
Laser
Beam Quality M²
< 1.3
Galvanometer
Scan Range
< 50*50 mm
Galvanometer
Repeatability
< 1 μm
Galvanometer
Scan Speed
≤ 3.5 m/s
Z-Axis
Travel
200 mm
CCD Monitoring
Camera Pixels
5 million
Processing
Minimum Pore Size
5 μm
Processing
Accuracy
± 3 μm
Power
Supply
220V 50-60Hz 12A
Dimensions
Dimensions
750 * 1100 * 1700 mm
Service Scope
Technical services, technology development, and consulting; technical exchange and promotion. Wholesale and retail of computer software and hardware. Sales of functional glass, new optical materials, optical instruments, and specialized equipment for semiconductor devices. Expertise in experimental analysis instruments, CNC machine tools, instruments and meters, electronic components, electromechanical equipment, and fiber optics.
Detailed Photos
Frequently Asked Questions
1. What is the minimum pore size this system can process?
The system is capable of a minimum processing pore size of 5 μm, making it ideal for high-precision microhole requirements.
2. Which materials are compatible with the ultraviolet laser?
The FM-UV3 system can process a wide variety of materials including metals, alloys, ceramics, organics, glass, and silicon wafers.
3. How does the system ensure machining accuracy?
It uses a high-power UV laser for minimal heat-affected zones, a high-resolution industrial camera for precise focusing, and a marble table top for ultimate stability.
4. Can the system perform 3D structure etching?
Yes, the Z-axis is electrically adjustable, which allows the system to meet the specific requirements for etching complex three-dimensional structures.
5. What industries typically use this microhole machining system?
Main applications include electronics manufacturing (semiconductors, ITO film), medical (biosensors, drug filtration), and new energy (lithium battery separators).
6. What is the depth-to-width ratio capability?
The system achieves a maximum depth-to-width ratio of greater than 10:1, providing high versatility for micro-nozzle and filtration components.
STYRL Laser
